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  1. iopscience.iop.org › article › 10Development of a bipolar electrostatic chuck with a compliant ...

    Jan 21, 2022 · Abstract. This study proposes and verifies bipolar electrostatic grippers stacking 3D-printed-layered modules consisting of arrays of elastically deformable bipolar beams.

  2. euvlsymposium.lbl.gov › pdf › 2007Comparison of Coulombic and Johnsen-Rahbek Electrostatic ...

    Type of chuck is characterized by the dielectric material and the resulting mechanism of force generation. Chucks can be either monopolar or bipolar. Slab-type or pin-type based on the surface characteristics. A pin-type chuck is proposed to minimize the effects of particles.

  3. www.researchgate.net › figure › FundamentalFundamental structure of a bipolar electrostatic chuck.

    A bipolar electrostatic chuck (ESC) is a device that clamps target objects using a uniform electrostatic force. Traditional ESCs cannot satisfy these demands because of their planar surfaces.

  4. ieeexplore.ieee.org › document › 7365233Simulation studies on bipolar electrostatic chucks | IEEE ...

    Abstract: We use Comsol Multiphysics, a finite element simulation tool to study a bipolar electrostatic chuck (E-chuck). The influences of the substrate and dielectric types, wafer thickness, and air gap are investigated.

  5. link.springer.com › article › 10Development of bipolar electrostatic chucks with a compliant ...

    • Evaluation of The Abrasive Water Jet Process
    • The Attractive Performance
    • Demonstration

    For ease of explanation, the ESCs made using 3D printing and the ESCs fabricated using the proposed cutting method will be referred to as EP (Electrostatic chuck printed) and EW (Electrostatic chuck water jetted), respectively. Figure 3a–g shows SEM images of the beam tip of an EP and an EW. The former has round corners and is only partially flat, ...

    See full list on link.springer.com

    The attractive force (F) generated by a single module or a stacked device and the target object is calculated by dividing the values recorded by the balance by the respective attractive area. Figure 3h, i shows plots of F against the displacement of the motorized stage. The horizontal axis represents the distance from the beam tips to the glass sli...

    See full list on link.springer.com

    To evaluate the performance of the proposed ESC device, a pick-and-place demonstration of a thin dielectric film the same as Hayashi’s work was conducted. Since residual charge remains inside the film even after removing the applied voltage, a certain amount of attractive force is generated which prevents the film from detaching. Hayashi’s tilting...

    See full list on link.springer.com

  6. www.researchgate.net › publication › 357762675(PDF) Development of a bipolar electrostatic chuck with a ...

    Jan 11, 2022 · In this paper, we propose a successful fabrication method for a bipolar electrostatic chuck (ESC) device with a beam-array assembly, in order to achieve a fairly flat surface on the beam's tip.

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  8. pubs.aip.org › avs › jvbGeneration mechanism of residual clamping force in a bipolar ...

    Nov 24, 2003 · Clamping and residual clamping forces of a Johnsen–Rahbek-type (JR-type) bipolar electrostatic chuck (ESC), which has electrically independent dual electrodes, were measured. Area ratios of the ESC’s two electrodes ranged from 1 to 4.6.