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- Type of chuck is characterized by the dielectric material and the resulting mechanism of force generation. Chucks can be either monopolar or bipolar.
euvlsymposium.lbl.gov/pdf/2007/MA-P04- Engelstad.pdfComparison of Coulombic and Johnsen-Rahbek Electrostatic ...
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Are chucks monopolar or bipolar?
What is a bipolar electrostatic chuck?
How do we study a bipolar electrostatic Chuck (E-Chuck)?
What is a Bipolar RF Chuck?
Jan 21, 2022 · For example, a bipolar electrostatic chuck was created by stacking two monopolar electrostatic chucks, each having beam assemblies, by a wet etching process . Integrated bipolar electrostatic chucks were created by the dry etching process of an integrated three-layer (conductor–insulator–conductor) structure [ 15 ] and additive ...
Electrostatic chucks use the attraction of opposite charges to hold both insulating and conducting substrates for a variety of microfabrication processes. These processes include lithography, ion implantation, plasma etch, film deposition, and inspection.
Such designs may be monopolar, bipolar, tripolar, etc. , and use gripping electrodes which are embedded in insulator on all sides or protected from plasma with a metal shield electrode.
A bipolar electrostatic chuck (ESC) is a device that clamps target objects using a uniform electrostatic force. Traditional ESCs cannot satisfy these demands because of their planar surfaces.
We use Comsol Multiphysics, a finite element simulation tool to study a bipolar electrostatic chuck (E-chuck). The influences of the substrate and dielectric types, wafer thickness, and air gap are investigated.
Thus the DR4, DR5, and DR6 systems can drive bipolar and tripolar chucks; and the DR5 and DR6 can also drive monopolar chucks since their substrate sensing works with monopolar electrodes. These supplies also have self-learning and user-adjustable features which can adapt to gripping highly resistive substrates without device damage, and which ...
