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Type of chuck is characterized by the dielectric material and the resulting mechanism of force generation. Chucks can be either monopolar or bipolar. Slab-type or pin-type based on the surface characteristics. A pin-type chuck is proposed to minimize the effects of particles.
Jan 21, 2022 · Abstract. This study proposes and verifies bipolar electrostatic grippers stacking 3D-printed-layered modules consisting of arrays of elastically deformable bipolar beams.
A bipolar electrostatic chuck (ESC) is a device that clamps target objects using a uniform electrostatic force. Traditional ESCs cannot satisfy these demands because of their planar surfaces.
Context 1. ... the thickness of the pillar is d þ h , and the thickness of the gap is h þ . According to the principle of equal potential, we established a set of equivalent circuit for the...
Jan 11, 2022 · In this paper, we propose a successful fabrication method for a bipolar electrostatic chuck (ESC) device with a beam-array assembly, in order to achieve a fairly flat surface on the beam's tip.
Jan 22, 2024 · A bipolar electrostatic chuck (ESC) is a device that clamps target objects using a uniform electrostatic force. Traditional ESCs cannot satisfy these demands because of their planar surfaces. Bipolar ESCs with a compliant multi-beam assembly have been proposed to manipulate such objects while leveraging the uniform force distribution of ESCs.
People also ask
What is a bipolar electrostatic chuck?
Are chucks monopolar or bipolar?
Are bipolar Electrostatic chucks a compliant beam-array assembly?
How are bipolar ESCs developed?
What is electrostatic chuck?
What are the characteristics of Chuck?
This paper describes the development of bipolar electrostatic chucks with a compliant beam-array structure using abrasive water jet technology. The chucks are cut out from 3D-printed composite-laminated plates and the attractive forces that they generate are measured.
